Showing results 1 to 3 of 3
ECR-PECVD 법으로 증착한 TiN 박막의 Cu에 대한 확산방지막 특성 = The barrier property of ECR-PECVD TiN film against Cu diffusionlink 이수정; Lee, Soo-Jeong; et al, 한국과학기술원, 1997 |
Low temperature nucleation of the perovskite phase in the deposition of Pb(Zr,Ti)O-3 films on the Pt/SiO2/Si substrate by electron cyclotron resonance plasma enhanced chemical vapor deposition Kim, Jae Whan; Kim, Hyun Ho; Wee, Dang-Moon; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.36, no.7B, pp.936 - 938, 1997-07 |
Modeling of hysteresis curves of ferroelectric capacitor with inhomogeneous charged defect density and polarization parameters in the ferroelectric thin film Kim, YI; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1, v.39, no.3A, pp.1309 - 1319, 2000-01 |
Discover