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Freestanding nanostructures via reactive ion beam angled etching Atikian, Haig A.; Latawiec, Pawel; Burek, Michael J.; Sohn, Young-Ik; Meesala, Srujan; Gravel, Normand; Kouki, Ammar B.; et al, APL PHOTONICS, v.2, no.5, 2017-05 |
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