Browse by Subject Capacitive Micromachined Ultrasonic Transducer (CMUT)▼aMEMS▼aHigh sensitivity▼aNanosphere lithography▼aGas sensor
Showing results 1 to 1 of 1
| Design and fabrication of high sensitivity nanomechanical resonant gas sensors using nanosphere lithography = 나노스피어리소그래피를 이용한 고민감도의 나노 공진 기체 검출기 설계 및 공정link Kim, Yoo-Jeong; Lee, Hyun Joo Jenny; et al, 한국과학기술원, 2021 |
Discover
Type
Open Access
Date issued
- 31,154 2020 - 2024
- 99,968 2010 - 2019
- 75,670 2000 - 2009
- 44,727 1990 - 1999
- 14,360 1980 - 1989
- 62 1964 - 1969