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A low-profile three-dimensional neural probe array using a silicon lead transfer structure

Cheng, Ming-Yuan; Je, Minkyu; Tan, Kwan Ling; Tan, Ee Lim; Lim, Ruiqi; Yao, Lei; Li, Peng; et al, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.23, no.9, 2013-09

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