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Peculiarities of relief formation under InP surface sputtering will argon ions and atoms

Soshnikov I.P.; Lunev A.V.; Rotkina L.G.; Gaevskij M.E.; Kudryavtsev Yu.A.; Barchenko V.T.; Yakovlev S.P.; et al, Fizika i Khimiya Obrabotki Materialov, no.3, pp.24 - 27, 2001-12

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