Showing results 1 to 2 of 2
Effects of Bottom Polysilicon Doping on the Reliability of Interpoly Oxide Grown by Using Electron Cyclotron Resonance N2O-Plasma N-I Lee; J-W Lee; S-H Hur; H-S Kim; C-H Han, JAPANESE JOURNAL OF APPLIED PHYSICS, v.37, no.3B, pp.1125 - 1128, 1998-01 |
Indium content measurement and influence on etch pit density of VPE grown InxGa1-xAs(x<0.03)/GaAs epilayers H-S Kim; S-K Min; C LEE, JOURNAL OF CRYSTAL GROWTH, v.92, no.1-2, pp.77 - 82, 1988-10 |
Discover