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Schedulability analysis of time-constrained cluster tools with bounded time variation by an extended Petri net Kim, JH; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.5, no.3, pp.490 - 503, 2008-07 |
Schedule Restoration for Single-Armed Cluster Tools Kim, Ja-Hee; Zhou, MengChu; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.27, no.3, pp.388 - 399, 2014-08 |
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