Browse by Subject RF DISCHARGE

Showing results 9 to 13 of 13

9
Role of low-frequency power in dual-frequency capacitive discharges

Ahn, Seung Kyu; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.95, no.11, 2009-09

10
Role of transverse magnetic field in the capacitive discharge

You, SJ; Hai, TT; Park, M; Kim, DW; Kim, JH; Seong, DJ; Shin, YH; et al, THIN SOLID FILMS, v.519, pp.6981 - 6989, 2011-08

11
Spatio-temporally resolved electron temperature in argon radio-frequency capacitive discharge at atmospheric pressure

Park, Sanghoo; Choe, Wonho; Moon, Se Youn; Yoo, Suk Jae, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.24, no.3, 2015-05

12
Strong variation of average ion energy in oscillation frequency of sheath potential

Lee, Young D.; Kim, SS; Ku, SH; Chang, Choong-Seock, Physics of Plasmas, v.7, no.2, pp.766 - 769, 2000-02

13
The nonlocal and local property of the electron energy distribution function in a low-pressure inductively coupled plasma

Chung, C; Chang, Hong-Young, PHYSICS OF PLASMAS, v.7, no.9, pp.3826 - 3828, 2000-09

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