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SO1-based fabrication processes of the scanning mirror having vertical comb fingers Lee, JH; Ko, YC; Jeong, HM; Choi, BS; Kim, JM; Jeon, DukYoung, SENSORS AND ACTUATORS A-PHYSICAL, v.102, no.1-2, pp.11 - 18, 2002-12 |
레이저 디스플레이용 광스캐너의 설계 및 제작에 관한 연구 = A study on the design and fabrication of silicon optical scanner for laser displaylink 이진호; Lee, Jin-Ho; et al, 한국과학기술원, 2003 |
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