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Poly(isobornyl methacrylate-co-3-(t-butoxycarbonyl)-1-vinyl-2-caprolactam) for an environmentally stable chemically amplified resist Kim, Jin-Baek; Choi, JH; Kim, H; Kwon, YG; Jung, MH, POLYMER JOURNAL, v.31, no.9, pp.695 - 699, 1999 |
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