Showing results 1 to 2 of 2
Capacitive micromachined ultrasonic transducer (CMUT) as a chemical sensor for DMMP detection Park, Kwan Kyu; Lee, Hyunjoo; Kupnik, Mario; Oralkan, Oemer; Ramseyer, Jean-Pierre; Lang, Hans Peter; Hegner, Martin; et al, SENSORS AND ACTUATORS B-CHEMICAL, v.160, no.1, pp.1120 - 1127, 2011-12 |
Improved all-silicon microcantilever heaters with integrated piezoresistive sensing Lee, Jungchul; King, William P., JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.17, no.2, pp.432 - 445, 2008-04 |
Discover