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Fast Optical Proximity Correction Using Graph Convolutional Network With Autoencoders Cho, Gangmin; Kim, Taeyoung; Shin, Youngsoo, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.36, no.4, pp.629 - 635, 2023-11 |
Optical Proximity Correction Using Bidirectional Recurrent Neural Network With Attention Mechanism Kwon, Yonghwi; Shin, Youngsoo, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.34, no.2, pp.168 - 176, 2021-05 |
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