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A Novel Process for Fabricating Vertical Silicon Nanotube Arrays Using Spacer Patterning Technique and Metal-assisted Chemical Etching Jeong, Hyeon Ho; 이정형; 복철규; Lee, Seok-Hee; Yoo, Seunghyup, nano Korea 2016 symposium, 나노코리아 조직위원회(나노기술연구협의회, 나노융합산업연구조합), 2016-07-14 |
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