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Design and fabrication of a capacitive infrared detector with a floating electrode and thermally isolatable bimorph legs Kwon, Il-Woong; Kim, Jong-Eun; Hwang, Chi-Ho; Lee, Yong-Soo; Lee, Hee-Chul, SENSORS AND ACTUATORS A-PHYSICAL, v.147, no.2, pp.391 - 400, 2008-10 |
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