Showing results 1 to 1 of 1
Evolution of vacuum ultraviolet emission in dual-frequency capacitively coupled plasmas Han, Duksun; Park, Jong-Bae; Kim, Young-Woo; Kwon, Deuk-Chul; Park, Sanghoo, CURRENT APPLIED PHYSICS, v.31, pp.239 - 245, 2021-11 |
Discover