Modeling, Design, Fabrication, and Demonstration of a Digital Micromirror With Interdigitated Cantilevers

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We present the modeling, design, fabrication, and measurement results of a novel digital micromirror based on a new actuator called interdigitated cantilevers. In contrast to conventional micromirrors that rotate through the twisting actuation of a hinge, this micromirror has a symmetric bidirectional rotation through a bending actuation of interdigitated cantilevers hidden under a mirror plate. For the static and dynamic characteristics of the proposed micromirror, analytical models were developed first on the basis of the Euler-Bernoulli beam equation, as well as both distributed- and lumped-parameter models. The results of the developed analytical models are in good agreement with those of a finite-element-method (FEM) simulation, having just a 10% deviation. On the basis of these analytical models, we successfully designed, fabricated, and evaluated a micromirror with a mirror size of 16 mu m x 16 mu m. The fabricated micromirror has a mechanical rotation angle of +/- 10 degrees, a pull-in voltage of 54 V, a resonant frequency of 350 kHz, and a switching response time of 17 mu s. The measurement results compare favorably with those of analytical models and FEM simulations, with deviations of less than 15% and 10%, respectively.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2009-12
Language
English
Article Type
Article
Keywords

MIRRORS

Citation

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.18, no.6, pp.1382 - 1395

ISSN
1057-7157
DOI
10.1109/JMEMS.2009.2031696
URI
http://hdl.handle.net/10203/99721
Appears in Collection
EE-Journal Papers(저널논문)
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