Parallel-Plate MEMS Variable Capacitor With Superior Linearity and Large Tuning Ratio Using a Levering Structure

Cited 20 time in webofscience Cited 0 time in scopus
  • Hit : 179
  • Download : 0
An innovative and simple method is proposed to achieve ultralinear behavior in a capacitance-versus-voltage response and to obtain a large capacitance tuning ratio in a parallel-plate microelectromechanical systems (MEMS) variable capacitor by moving the plate to an increasing-gap direction. By adopting a levering structure, the common closing-gap motion of the electrostatic actuator was transformed into an increasing-gap movement in order to decrease the capacitance as the actuation voltage was increased. By balancing out the rate that the plate moves up as the actuation voltage increased and the rate that the capacitance decreases as the plate moves up, high linearity was achieved. The proposed MEMS variable capacitor, which was fabricated via metal surface micromachining, showed an excellent linearity factor (LF) of 99.5% in the C-V response, and a capacitance tuning ratio of 134% was achieved in the actual usage range (10-45 V) at a low frequency. When it was operated at 1 GHz, the proposed device demonstrated an LF of 99.5% and a capacitance tuning ratio of 125%.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2011-12
Language
English
Article Type
Article
Keywords

DESIGN

Citation

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.20, no.6, pp.1345 - 1354

ISSN
1057-7157
URI
http://hdl.handle.net/10203/99703
Appears in Collection
EE-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 20 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0