Hot embossing of polymeric nanostructures using poly(dimethylsiloxane) replica molds based on three-dimensional colloidal crystals

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Hexagonally arrayed structures of the colloidal crystals with even surface is a good candidate for a master mold of soft lithography. By using high quality and robust 3D colloidal crystal mater mold, we successfully replicate the regular surface structure of colloidal crystal onto polystyrene (PS) thin films via a hot embossing technique, by using soft PDMS molds as a stamp. The replicated 2D patterns show high regular and periodic structures, with few defects over a large area. The periodicity of the patterns can be adjusted by varying the nanoparticle size of colloidal crystal master mold. Various hexagonally arrayed nanostructure patterns can be successfully fabricated, including close-packed and non-close-packed 20 arrays by the structural modification of 3D colloidal crystal templates. (C) 2011 Elsevier B.V. All rights reserved.
Publisher
ELSEVIER SCIENCE BV
Issue Date
2012-03
Language
English
Article Type
Article
Keywords

FABRICATION; DEVICES

Citation

MICROELECTRONIC ENGINEERING, v.91, pp.121 - 126

ISSN
0167-9317
DOI
10.1016/j.mee.2011.11.007
URI
http://hdl.handle.net/10203/99027
Appears in Collection
CBE-Journal Papers(저널논문)
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