Hexagonally arrayed structures of the colloidal crystals with even surface is a good candidate for a master mold of soft lithography. By using high quality and robust 3D colloidal crystal mater mold, we successfully replicate the regular surface structure of colloidal crystal onto polystyrene (PS) thin films via a hot embossing technique, by using soft PDMS molds as a stamp. The replicated 2D patterns show high regular and periodic structures, with few defects over a large area. The periodicity of the patterns can be adjusted by varying the nanoparticle size of colloidal crystal master mold. Various hexagonally arrayed nanostructure patterns can be successfully fabricated, including close-packed and non-close-packed 20 arrays by the structural modification of 3D colloidal crystal templates. (C) 2011 Elsevier B.V. All rights reserved.