DC Field | Value | Language |
---|---|---|
dc.contributor.author | Shin, Yunsang | ko |
dc.contributor.author | Min, Kyung Kyu | ko |
dc.contributor.author | Lee, Seok-Hee | ko |
dc.contributor.author | Lim, Sung Kyu | ko |
dc.contributor.author | Oh, Jae Sub | ko |
dc.contributor.author | Lee, Kee-Jeung | ko |
dc.contributor.author | Hong, Kwon | ko |
dc.contributor.author | Cho, Byung Jin | ko |
dc.date.accessioned | 2013-03-11T02:30:34Z | - |
dc.date.available | 2013-03-11T02:30:34Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2011-04 | - |
dc.identifier.citation | APPLIED PHYSICS LETTERS, v.98, no.17 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | http://hdl.handle.net/10203/98042 | - |
dc.description.abstract | Cubic-structured HfLaO embedded tetragonal ZrO2 is investigated for application to a dynamic random access memory capacitor dielectric. It is found that hole injection is the determining factor of the leakage current in the ZrO2-HfLaO stack and thus HfLaO should be kept away from the electrode interface due to its smaller valance band offset than that of ZrO2. The insertion of cubic-structured HfLaO into tetragonal ZrO2 with an optimized thickness combination can effectively reduce the equivalent oxide thickness without increasing the leakage current. (C) 2011 American Institute of Physics. [doi:10.1063/1.3583590] | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Crystallized HfLaO embedded tetragonal ZrO2 for dynamic random access memory capacitor dielectrics | - |
dc.type | Article | - |
dc.identifier.wosid | 000290046100069 | - |
dc.identifier.scopusid | 2-s2.0-79955698423 | - |
dc.type.rims | ART | - |
dc.citation.volume | 98 | - |
dc.citation.issue | 17 | - |
dc.citation.publicationname | APPLIED PHYSICS LETTERS | - |
dc.contributor.localauthor | Lee, Seok-Hee | - |
dc.contributor.localauthor | Cho, Byung Jin | - |
dc.contributor.nonIdAuthor | Lim, Sung Kyu | - |
dc.contributor.nonIdAuthor | Oh, Jae Sub | - |
dc.contributor.nonIdAuthor | Lee, Kee-Jeung | - |
dc.contributor.nonIdAuthor | Hong, Kwon | - |
dc.type.journalArticle | Article | - |
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