Carboxylic Group as the Origin of Electrical Performance Degradation during the Transfer Process of CVD Growth Graphene

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The large synthesis of graphene films by chemical vapor deposition (CVD) is expected to enable various applications. However, the transfer process of graphene from metal to dielectric substrate becomes a practical limitation in CVD method because of various chemical and mechanical stresses. In this paper, we have studied the critical factor of degradation and thereby to improve the electrical performance of graphene by CVD. It has been found that O=C-OH bonding is related to mobility degradation and doping effect. The removal of O=C-OH improves the carrier mobility by 30%. (C) 2012 The Electrochemical Society. [DOI: 10.1149/2.101204jes] All rights reserved.
Publisher
ELECTROCHEMICAL SOC INC
Issue Date
2012-02
Language
English
Article Type
Article
Keywords

FILMS

Citation

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.159, no.4, pp.K107 - K109

ISSN
0013-4651
DOI
10.1149/2.101204jes
URI
http://hdl.handle.net/10203/96998
Appears in Collection
EE-Journal Papers(저널논문)
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