Fabrication of thermally durable sub-wavelength periodic structures upon inorganic-organic hybrid materials by nano-imprinting

Abstract

We fabricated sub-wavelength periodic structures by thermal nano-imprinting using our original functionally modified inorganic-organic hybrid materials. The fabricated structures exhibited excellent uniformity and surface smoothness over a large imprinted area. In addition, optical transmittance is more than 90% within visible wavelength regions after heat treatment for 2 h at 300 degrees C. These nano-imprinted periodic structures showed high thermal durability without any structural changes after heating for 2 h at 200 degrees C, which is superior to commercially available organic imprinting materials. These nano-imprinted sub-wavelength periodic structures using our original inorganic-organic hybrid materials offer great potential for several applications in microphotonic and nanophotonic devices.