Fabrication of thermally durable sub-wavelength periodic structures upon inorganic-organic hybrid materials by nano-imprinting

We fabricated sub-wavelength periodic structures by thermal nano-imprinting using our original functionally modified inorganic-organic hybrid materials. The fabricated structures exhibited excellent uniformity and surface smoothness over a large imprinted area. In addition, optical transmittance is more than 90% within visible wavelength regions after heat treatment for 2 h at 300 degrees C. These nano-imprinted periodic structures showed high thermal durability without any structural changes after heating for 2 h at 200 degrees C, which is superior to commercially available organic imprinting materials. These nano-imprinted sub-wavelength periodic structures using our original inorganic-organic hybrid materials offer great potential for several applications in microphotonic and nanophotonic devices.
Publisher
INST PURE APPLIED PHYSICS
Issue Date
2007-06
Language
ENG
Keywords

LITHOGRAPHY; NANOIMPRINT

Citation

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v.46, no.6A, pp.3704 - 3709

ISSN
0021-4922
DOI
10.1143/JJAP.46.3704
URI
http://hdl.handle.net/10203/9694
Appears in Collection
MS-Journal Papers(저널논문)
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