Photo-imageable sol-gel hybrid materials for simple fabrication of micro-optical elements

Special attention has been focused on photo-imageable sol-gel hybrid (SGH) materials because of their synergetic effects, such as high photosensitivity and transparency, as well as mechanical and chemical durability resulting from the presence of polymer and silica networks in the hybrid structure. Photo-induced migration, which accompanies photopolymerization and photolocking in these materials, allows for the formation of convex micropatterns with a higher refractive index than the original film through exposure to UV radiation. Controlling the parameters affecting this photo-induced migration can permit modulation of the size and shape of such microstructures for the simple and cost-effective direct photofabrication of micro-optical elements, such as micro-lenses and microlens arrays.
Publisher
Amer Chemical Soc
Issue Date
2007
Language
ENG
Keywords

SURFACE-RELIEF GRATINGS; REFRACTIVE-INDEX; WAVE-GUIDES; PHOTOINDUCED DENSIFICATION; DIFFRACTION GRATINGS; FILMS; GLASSES; MICROOPTICS; PHOTOLOCKING; CIRCUITS

Citation

ACCOUNTS OF CHEMICAL RESEARCH, v.40, no.9, pp.903 - 912

ISSN
0001-4842
DOI
10.1021/ar6000439
URI
http://hdl.handle.net/10203/9693
Appears in Collection
MS-Journal Papers(저널논문)
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