Sol-gel reaction of 3-trimethoxysilylpropyl methacrylate (MPTS), heptadecafluorodecyltrimethoxysilane (PFAS), and zirconium n-propoxide (ZPO) chelated with methacrylic acid (MAA) was investigated depending on the catalyst concentration, the reaction time and the zirconium alkoxide addition for the fabrication of highly condensed fluorinated methacryl silica and silica-zirconia hybrid material (MF and MFZ hybrimer). Controlling the catalyst concentration and the reaction time has been found to be important parameters for the strengthening of the silica networks in MF hybrimer. The addition of zirconium alkoxide enhanced the condensation degree in short reaction time, which Could efficiently fabricate the highly condensed MFZ hybrimer. In particular, their molecular sizes have been found to be highly dependent on the extent of sol-gel reaction and were experimentally calculated. (C) 2008 Elsevier B.V. All rights reserved.