DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, SJ | ko |
dc.contributor.author | Cho, Byung Jin | ko |
dc.contributor.author | Bin Yu, M | ko |
dc.contributor.author | Li, MF | ko |
dc.contributor.author | Xiong, YZ | ko |
dc.contributor.author | Zhu, CX | ko |
dc.contributor.author | Chin, A | ko |
dc.contributor.author | Kwong, DL | ko |
dc.date.accessioned | 2013-03-08T09:55:45Z | - |
dc.date.available | 2013-03-08T09:55:45Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2005-09 | - |
dc.identifier.citation | IEEE ELECTRON DEVICE LETTERS, v.26, no.9, pp.625 - 627 | - |
dc.identifier.issn | 0741-3106 | - |
dc.identifier.uri | http://hdl.handle.net/10203/92785 | - |
dc.description.abstract | A high capacitance density (C-density) metal-insulator-metal (MIM) capacitor with niobium pentoxide (Nb2O5) whose k value is higher than 40, is developed for integrated RF bypass or decoupling capacitor application. Nb2O5 MIM with HfO2/Al2O3 barriers delivers a high C-density of > 17 fF/mu m(2) with excellent RF properties, while maintaining comparable leakage current and reliability properties with other high-k dielectrics. The capacitance from the dielectric is shown to be stable up to 20 GHz, and resonant frequency of 4.2 GHz and Q of 50 (at 1 GHz) is demonstrated when the capacitor is integrated using Cu-BEOL process. | - |
dc.language | English | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.title | Metal-insulator-metal RF bypass capacitor using niobium oxide (Nb2O5) with HfO2/Al2O3 barriers | - |
dc.type | Article | - |
dc.identifier.wosid | 000231577900009 | - |
dc.identifier.scopusid | 2-s2.0-26444438105 | - |
dc.type.rims | ART | - |
dc.citation.volume | 26 | - |
dc.citation.issue | 9 | - |
dc.citation.beginningpage | 625 | - |
dc.citation.endingpage | 627 | - |
dc.citation.publicationname | IEEE ELECTRON DEVICE LETTERS | - |
dc.identifier.doi | 10.1109/LED.2005.854378 | - |
dc.contributor.localauthor | Cho, Byung Jin | - |
dc.contributor.nonIdAuthor | Kim, SJ | - |
dc.contributor.nonIdAuthor | Bin Yu, M | - |
dc.contributor.nonIdAuthor | Li, MF | - |
dc.contributor.nonIdAuthor | Xiong, YZ | - |
dc.contributor.nonIdAuthor | Zhu, CX | - |
dc.contributor.nonIdAuthor | Chin, A | - |
dc.contributor.nonIdAuthor | Kwong, DL | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | bypass capacitor | - |
dc.subject.keywordAuthor | decoupling capacitor | - |
dc.subject.keywordAuthor | high-kappa dielectric | - |
dc.subject.keywordAuthor | metal-insulator-metal (MIM) capacitor | - |
dc.subject.keywordAuthor | niobium oxide (Nb2O5) | - |
dc.subject.keywordAuthor | radio frequency integrated circuit (RF IC) | - |
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