DC Field | Value | Language |
---|---|---|
dc.contributor.author | Oh, Joon-Seok | ko |
dc.contributor.author | Lee, Seung-Ryul | ko |
dc.contributor.author | Lee, Jin-Ho | ko |
dc.contributor.author | Ahn, Byung Tae | ko |
dc.date.accessioned | 2009-05-26T06:44:35Z | - |
dc.date.available | 2009-05-26T06:44:35Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2007-02 | - |
dc.identifier.citation | Korean Journal of Materials Research, v.17, no.2, pp.115 - 120 | - |
dc.identifier.issn | 1225-0562 | - |
dc.identifier.uri | http://hdl.handle.net/10203/9155 | - |
dc.description.abstract | Polycrystalline silicon (poly-Si) thin film transistors (TFTs) might be fabricated on the mica substrate and transferred to a flexible plastic substrate because mica can be easily cleaved into a thin layer. To overcome the adhesion and stress problem between poly-Si film and mica substrate, a buffer layer consisting of SiOx/Ta/Ti three layers has been developed. The SiOx layer is for electrical isolation, the Ti layer is for adhesion of SiOx and mica. and Ta is for stress relief between SiOx and Ti. A TFT was fabricated on the mica substrate by a conventional Si process and was successfully transferred to a plastic substrate. | - |
dc.description.sponsorship | 본 연구는 한국전자통신연구원(ETRI) 정보통신연구개발 사업의 지원으로 수행되었습니다. | en |
dc.language | Korean | - |
dc.language.iso | ko | en |
dc.publisher | Materials Research Society of Korea | - |
dc.title | Formation of a buffer layer on mica substrate for application to flexible thin film transistors | - |
dc.type | Article | - |
dc.identifier.scopusid | 2-s2.0-34547977581 | - |
dc.type.rims | ART | - |
dc.citation.volume | 17 | - |
dc.citation.issue | 2 | - |
dc.citation.beginningpage | 115 | - |
dc.citation.endingpage | 120 | - |
dc.citation.publicationname | Korean Journal of Materials Research | - |
dc.identifier.doi | 10.3740/MRSK.2007.17.2.115 | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.identifier.kciid | ART001056712 | - |
dc.contributor.localauthor | Ahn, Byung Tae | - |
dc.contributor.nonIdAuthor | Oh, Joon-Seok | - |
dc.contributor.nonIdAuthor | Lee, Seung-Ryul | - |
dc.contributor.nonIdAuthor | Lee, Jin-Ho | - |
dc.description.isOpenAccess | N | - |
dc.subject.keywordAuthor | Buffer layer | - |
dc.subject.keywordAuthor | Flexible substrate | - |
dc.subject.keywordAuthor | Layer transfer | - |
dc.subject.keywordAuthor | Mica | - |
dc.subject.keywordAuthor | Poly-Si TFTs | - |
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