Tunable optical bandpass filter with variable-aperture MEMS reflector

Cited 7 time in webofscience Cited 0 time in scopus
  • Hit : 183
  • Download : 0
We report on a tunable optical bandpass filter with precise and independent control of its optical bandwidth and center wavelength. The optical filter is based on a double-pass monochromator configuration and a variable-aperture microelectromechanical systems (MEMS) reflector with two blocking micromirrors that manipulate the optical passband. The MEMS reflector is fabricated on the sidewalls of (110) silicon-on-insulator material by a combination of wet etching and deep reactive ion etching. The l-dB optical bandwidth is continuously tunable from 3.65 to 6.35 run by changing the position of the blocking micromirrors with lateral combdrive actuators. The center wavelength can be accurately controlled within a 30-nm spectral range by rotating the diffraction grating and/or changing the center location of the variable aperture with the combdrive actuators. The measured group delay variation across the passband was negligible.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2006-12
Language
English
Article Type
Article
Keywords

COMB-DRIVE; DISPERSION COMPENSATOR; TRANSMISSION-SYSTEMS; BANDWIDTH; RECEIVER; SILICON; DESIGN; MICROMIRRORS; SENSITIVITY; ACTUATORS

Citation

JOURNAL OF LIGHTWAVE TECHNOLOGY, v.24, no.12, pp.5095 - 5102

ISSN
0733-8724
DOI
10.1109/JLT.2006.884987
URI
http://hdl.handle.net/10203/91382
Appears in Collection
EE-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 7 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0