Spiral inductors using polymer-core conductors

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dc.contributor.authorYook, Jong-Minko
dc.contributor.authorKwon, Young Seko
dc.date.accessioned2013-03-07T12:48:17Z-
dc.date.available2013-03-07T12:48:17Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2007-07-
dc.identifier.citationIEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, v.17, no.7, pp.495 - 497-
dc.identifier.issn1531-1309-
dc.identifier.urihttp://hdl.handle.net/10203/90208-
dc.description.abstractWe made thick spiral inductors using a polymer-core conductor. The proposed fabrication process to make the polymer-core conductor is very easy and cost effective compared with other radio frequency microelectromechanical systems processes. SU-8 photoresist was used as the core. The fabricated spiral inductors on a high resistivity silicon, 2500 Omega . Cm have a very high Q factor of more than 40 at 2 GHz.-
dc.languageEnglish-
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC-
dc.subjectRF ICS-
dc.titleSpiral inductors using polymer-core conductors-
dc.typeArticle-
dc.identifier.wosid000247888500010-
dc.identifier.scopusid2-s2.0-34547402692-
dc.type.rimsART-
dc.citation.volume17-
dc.citation.issue7-
dc.citation.beginningpage495-
dc.citation.endingpage497-
dc.citation.publicationnameIEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS-
dc.identifier.doi10.1109/LMWC.2007.899305-
dc.contributor.localauthorKwon, Young Se-
dc.contributor.nonIdAuthorYook, Jong-Min-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorhigh Q-
dc.subject.keywordAuthorinductor-
dc.subject.keywordAuthorpolymer-core conductor-
dc.subject.keywordAuthorSU-8-
dc.subject.keywordPlusRF ICS-
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