Spiral inductors using polymer-core conductors

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We made thick spiral inductors using a polymer-core conductor. The proposed fabrication process to make the polymer-core conductor is very easy and cost effective compared with other radio frequency microelectromechanical systems processes. SU-8 photoresist was used as the core. The fabricated spiral inductors on a high resistivity silicon, 2500 Omega . Cm have a very high Q factor of more than 40 at 2 GHz.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2007-07
Language
English
Article Type
Article
Keywords

RF ICS

Citation

IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, v.17, no.7, pp.495 - 497

ISSN
1531-1309
DOI
10.1109/LMWC.2007.899305
URI
http://hdl.handle.net/10203/90208
Appears in Collection
EE-Journal Papers(저널논문)
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