High-quality 2.5 GHz ZnO-based FBAR devices for broadband WiMAX applications

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The improvements of resonance characteristics of ZnO-based film bulk acoustic-wave resonator (FBAR) devices operating at 2.5 GHz are presented for the first time. Because of thermal annealing processes, the resonance characteristics could be significantly improved. At about 2.5 GHz, excellent resonance characteristics are observed in terms of good return loss and high quality factor.
Publisher
INST ENGINEERING TECHNOLOGY-IET
Issue Date
2008-02
Language
English
Article Type
Article
Citation

ELECTRONICS LETTERS, v.44, no.5, pp.387 - 389

ISSN
0013-5194
DOI
10.1049/el:20080218
URI
http://hdl.handle.net/10203/89795
Appears in Collection
EE-Journal Papers(저널논문)
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