Realization ofFBAR Devices for Broadband WiMAX Applications

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Effects of addition of Cr adhesion layer to W/SiO2 multilayer Bragg reflectors on the resonance characteristics of film bulk acoustic resonator (FBAR) devices are presented. Main resonance peaks could be significantly moved to higher frequency mainly due to the addition of Cr adhesion layer to multilayer Bragg reflectors and control of the bottom electrode thickness as well. The FBAR devices with Cr adhesion layer in Bragg reflectors could result in more improved resonance characteristics at about ~ 3 GHz in terms of return loss and Q-factor
Publisher
한국정보통신학회
Issue Date
2008-03
Language
Korean
Citation

JOURNAL OF INFORMATION AND COMMUNICATION CONVERGENCE ENGINEERING, v.6, no.1, pp.34 - 37

ISSN
1738-0235
URI
http://hdl.handle.net/10203/89109
Appears in Collection
EE-Journal Papers(저널논문)
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