High-quality solenoid inductor using dielectric film for multichip modules

Abstract

For multilayer applications, we made high-quality and easily fabricated solenoid inductors using a dielectric material (UPILEX-S, UBE Industries, Tokyo, Japan). These inductors fabricated on UPILEX-S had a larger Q factor compared to that of a spiral inductor fabricated on a silicon or GaAs substrate. Furthermore, it is possible to, stack these inductors to make multichip modules using solder or gold stud bumps. From the measurement, solenoid inductors fabricated on 50-mu m-thick film showed very high Q factors and stable inductances.