비가수 솔-젤 법을 이용한 저유전율 유-무기 하이브리드 재료Low Dielectric Constant Organic-Inorganic Hybrid Materials by Non-Hydrolytic Sol-Gel Method
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 최천기 | ko |
| dc.contributor.author | 김우수 | ko |
| dc.contributor.author | 배병수 | ko |
| dc.date.accessioned | 2013-03-06T15:34:59Z | - |
| dc.date.available | 2013-03-06T15:34:59Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2005 | - |
| dc.identifier.citation | ELECTRONIC MATERIALS LETTERS, v.1, no.1, pp.87 - 90 | - |
| dc.identifier.issn | 1738-8090 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/87445 | - |
| dc.description.abstract | In this paper, we report the fabrication of fluorinated organic-inorganic hybrid materials and the investigation of the effects of fluorine contents on the dielectric constant of the fluorinated organic-inorganic hybrid materials. Thickness of the hybrid thin film was about 500 nm by single spin coating and the adhesion between the substrate and the hybrid film was good. Dielectric constants of hybrid thin films decreased from 4.2 to 2.98 (at 1 MHz) as the fluorine content increased. | - |
| dc.language | Korean | - |
| dc.publisher | Korean Inst Metals Materials | - |
| dc.title | 비가수 솔-젤 법을 이용한 저유전율 유-무기 하이브리드 재료 | - |
| dc.title.alternative | Low Dielectric Constant Organic-Inorganic Hybrid Materials by Non-Hydrolytic Sol-Gel Method | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 1 | - |
| dc.citation.issue | 1 | - |
| dc.citation.beginningpage | 87 | - |
| dc.citation.endingpage | 90 | - |
| dc.citation.publicationname | ELECTRONIC MATERIALS LETTERS | - |
| dc.contributor.localauthor | 배병수 | - |
| dc.contributor.nonIdAuthor | 최천기 | - |
| dc.contributor.nonIdAuthor | 김우수 | - |
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.