비가수 솔-젤 법을 이용한 저유전율 유-무기 하이브리드 재료

Abstract

In this paper, we report the fabrication of fluorinated organic-inorganic hybrid materials and the investigation of the effects of fluorine contents on the dielectric constant of the fluorinated organic-inorganic hybrid materials. Thickness of the hybrid thin film was about 500 nm by single spin coating and the adhesion between the substrate and the hybrid film was good. Dielectric constants of hybrid thin films decreased from 4.2 to 2.98 (at 1 MHz) as the fluorine content increased.