비가수 솔-젤 법을 이용한 저유전율 유-무기 하이브리드 재료 Low Dielectric Constant Organic-Inorganic Hybrid Materials by Non-Hydrolytic Sol-Gel Method

In this paper, we report the fabrication of fluorinated organic-inorganic hybrid materials and the investigation of the effects of fluorine contents on the dielectric constant of the fluorinated organic-inorganic hybrid materials. Thickness of the hybrid thin film was about 500 nm by single spin coating and the adhesion between the substrate and the hybrid film was good. Dielectric constants of hybrid thin films decreased from 4.2 to 2.98 (at 1 MHz) as the fluorine content increased.
Publisher
Korean Inst Metals Materials
Issue Date
2005
Language
KOR
Citation

ELECTRONIC MATERIALS LETTERS, v.1, no.1, pp.87 - 90

ISSN
1738-8090
URI
http://hdl.handle.net/10203/87445
Appears in Collection
MS-Journal Papers(저널논문)
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