모델기반의 전자부품 FAB설비 생산기준정보 추정 Model-based Estimation of Production Parameters of Electronics FAB Equipment

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In this paper, we propose a model-based approach to estimating production parameters of semiconductor FAB equipment. For FAB scheduling, for example, we need to know equipment’s production parameters such as flow time, tact time, setup time, and down time. However, these data are not available, and they have to be estimated from material move data such as loading times and unloading times that are automatically collected in modern automated semiconductor FAB. The proposed estimation method may be regarded as a Bayes estimation method because we use additional information about the production parameters. Namely, it is assumed that the technical ranges of production parameters are known. The proposed estimation method has been applied to a LCD FAB, and found to be valid and useful.
Publisher
대한산업공학회
Issue Date
2007-06
Language
Korean
Citation

대한산업공학회지, v.33, no.2, pp.166 - 173

ISSN
1225-0988
URI
http://hdl.handle.net/10203/87152
Appears in Collection
IE-Journal Papers(저널논문)
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