DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, EC | ko |
dc.contributor.author | Chang, Kee-Joo | ko |
dc.date.accessioned | 2013-03-06T05:38:20Z | - |
dc.date.available | 2013-03-06T05:38:20Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2003-12 | - |
dc.identifier.citation | PHYSICA B-CONDENSED MATTER, v.340, pp.974 - 977 | - |
dc.identifier.issn | 0921-4526 | - |
dc.identifier.uri | http://hdl.handle.net/10203/85983 | - |
dc.description.abstract | We propose an electrically inactive nitrogen complex in oxynitrides through first-principles pseudopotential calculations. This complex consisting of two N atoms at O sites and an O vacancy removes the electrical activity of O vacancies, without bonding with hydrogen, and thus improves the electrical properties of oxynitrides. The stability of the N complex is greatly enhanced as going from the bulk to interface region. We also suggest that charge traps involving a single N atom, such as a bridging N center, are deactivated by reactions with O or NO interstitials. (C) 2003 Elsevier B.V. All rights reserved. | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE BV | - |
dc.subject | SILICON-OXIDE | - |
dc.subject | N2O | - |
dc.subject | OXYGEN | - |
dc.subject | FILMS | - |
dc.title | Atomic model for the electrical deactivation of N in Si oxynitrides | - |
dc.type | Article | - |
dc.identifier.wosid | 000188300200204 | - |
dc.identifier.scopusid | 2-s2.0-0346685979 | - |
dc.type.rims | ART | - |
dc.citation.volume | 340 | - |
dc.citation.beginningpage | 974 | - |
dc.citation.endingpage | 977 | - |
dc.citation.publicationname | PHYSICA B-CONDENSED MATTER | - |
dc.contributor.localauthor | Chang, Kee-Joo | - |
dc.contributor.nonIdAuthor | Lee, EC | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordAuthor | Si oxynitride | - |
dc.subject.keywordAuthor | nitrogen | - |
dc.subject.keywordAuthor | charge trap | - |
dc.subject.keywordPlus | SILICON-OXIDE | - |
dc.subject.keywordPlus | N2O | - |
dc.subject.keywordPlus | OXYGEN | - |
dc.subject.keywordPlus | FILMS | - |
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