The effect of processing parameter on the piezoelectric d-coefficients of PZT thin films

Abstract

We have studied the effect of crystallization temperature, which is one of the most fundamental processing parameters of leads zirconate titanate (PZT) thin film, on the piezoelectric properties by our pneumatic loading method. Even though the piezoelectric properties of thin films are very critical factors in the micro-electro mechanical system (MEMS) and thin film sensor devices, very few reports are provided for the last decade unlikely on bulk piezoelectric devices. We have found that the piezoelectric properties of thin films are improved as the increase of crystallization temperature up to 750degreesC and this behavior can be also explained by the analysis of dielectric polarization hysteresis loop, crystal structures and scanning electron microscopy.