Effects of post-annealing on the interface microstructure of (Ba,Sr)TiO3 thin films

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The effects of post-annealing on the interface microstructure of Ba0.6Sr0.4TiO3 (BST) thin films prepared by metalorganic chemical vapor deposition have been studied by a transmission electron microscopy (TEM). As-deposited BST film was partially crystallized on (1 1 1) textured Pt/SiO2/Si substrate. After a post-annealing process at 750 degreesC, the BST films were preferably crystallized with (1 1 I) plane. However, the lattice of crystallized BST was distorted at the BST/Pt interface, though Ba0.6Sr0.4TiO3 has a cubic structure. From a high-resolution TEM study we found that the adjacent BST crystallitas with different orientations lead to the lattice distortion. A selected area electron diffraction pattern clearly shows the split-spots from the distorted lattices which has 4-5 degrees distortion angles. (C) 2001 Elsevier Science B.V. All rights reserved.
Publisher
ELSEVIER SCIENCE BV
Issue Date
2001-04
Language
English
Article Type
Article
Keywords

DEPOSITION; (BA; TITANATE

Citation

JOURNAL OF CRYSTAL GROWTH, v.224, no.3-4, pp.251 - 255

ISSN
0022-0248
URI
http://hdl.handle.net/10203/85796
Appears in Collection
MS-Journal Papers(저널논문)
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