Recent progress of lithographic micro fabrication by the TPA-induced photopolymerization

Cited 20 time in webofscience Cited 0 time in scopus
  • Hit : 257
  • Download : 0
Several different structures of micro-objects were fabricated by two-photon initiated photopolymerization using newly synthesized chromophore whose structures have been engineered for high two-photon activity. A raster graphics type voxel matrix scanning (VMS) scheme allowed fabrication of two-dimensional (2D) micro-object from a bitmap for-mat figure. Using this technique along with the vacuum pressure discrepancy technique, nano-precision polydimethylsiloxane (PDMS) replica has been fabricated from it original PDMS mold that was originally prepared by two-photon initiated photopolymerization of soft-resin. For better result in photonic crystal fabrication, a quantized-pixel laser writing scheme was employed. A complicated sub-micron 3D photonic lattice was fabricated with high reproducibility. In order to enhance physical/mechanical stability of resulting microobject, we have tested a new material system which consists of sol-gel precursor and photocrosslinking of soft-resin. The physical/mechanical stability of micro-object was enhanced greatly by introducing the formation of silica glass interpenetrating network with organic polymer resin.
Publisher
TECHNICAL ASSOC PHOTOPOLYMERS
Issue Date
2004
Language
English
Article Type
Article
Keywords

ABSORPTION CROSS-SECTIONS; 2-PHOTON ABSORPTION; 3-DIMENSIONAL MICROFABRICATION; DITHIENOTHIOPHENE; MICROSTRUCTURES; EFFICIENT; MOLECULES; STORAGE; DESIGN; DYES

Citation

JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, v.17, no.3, pp.385 - 392

ISSN
0914-9244
DOI
10.2494/photopolymer.17.385
URI
http://hdl.handle.net/10203/83287
Appears in Collection
ME-Journal Papers(저널논문)PH-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 20 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0