Annealing temperature effect of PbZr0.4Ti0.6O3 film on La1/2Sr1/2CoO3 bottom electrode
We have investigated the ferroelectric and electrical properties of PZT 40/60 films on the bottom La1/2Sr1/2CoO3(LSCO) electrode. The LSCO bottom electrode was sputtered on the SiO2/Si(100). As the annealing temperature of PZT capacitors on the LSCO is increased, the ferroelectric properties gradually increase with the annealing temperature up to 650degreesC. However, for the PZT capacitors annealed above 650degreesC, electrical measurement cannot be performed.
- Publisher
- TRANS TECH PUBLICATIONS LTD
- Issue Date
- 2004
- Language
- English
- Article Type
- Article; Proceedings Paper
- Keywords
LA0.5SR0.5COO3; CAPACITORS; TITANATE
- Citation
MATERIALS SCIENCE FORUM, v.449-4, pp.957 - 960
- ISSN
- 0255-5476
- Appears in Collection
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