DC Field | Value | Language |
---|---|---|
dc.contributor.author | 조영호 | ko |
dc.contributor.author | 이원철 | ko |
dc.contributor.author | 한기호 | ko |
dc.date.accessioned | 2013-03-04T03:51:58Z | - |
dc.date.available | 2013-03-04T03:51:58Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2002-12 | - |
dc.identifier.citation | JOURNAL OD SEMICONDUCTOR TECHNOLOGY AND SCIENCE, v.2, no.4, pp.280 - 287 | - |
dc.identifier.issn | 1598-1657 | - |
dc.identifier.uri | http://hdl.handle.net/10203/81806 | - |
dc.description.abstract | We present technical issues involved in the development of actuators and sensors for applications to high-precision Micro Electro Mechanical System (MEMS). The technical issues include fabrication uncertainty and noise disturbance, causing major difficulties for MEMS to achieve high-precision actuation and detection functions. For nano-precision actuators, we solve the fabrication instability and electrical noise problems using digital actuators coupled with nonlinear mechanical modulators. For the high-precision capacitive sensors, we present a branched finger electrodes using high-amplitude anti-phase sensing signals. We also demonstrate the potential applications of the nanoactuators and nanodetectors to high-precision positioning MEMS. | - |
dc.language | English | - |
dc.publisher | IEEK | - |
dc.title | Fabrication Uncertainty and Noise Issues in High-Precision MEMS Actuators and Sensors | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 2 | - |
dc.citation.issue | 4 | - |
dc.citation.beginningpage | 280 | - |
dc.citation.endingpage | 287 | - |
dc.citation.publicationname | JOURNAL OD SEMICONDUCTOR TECHNOLOGY AND SCIENCE | - |
dc.contributor.localauthor | 조영호 | - |
dc.contributor.nonIdAuthor | 이원철 | - |
dc.contributor.nonIdAuthor | 한기호 | - |
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