Fabrication Uncertainty and Noise Issues in High-Precision MEMS Actuators and Sensors

We present technical issues involved in the development of actuators and sensors for applications to high-precision Micro Electro Mechanical System (MEMS). The technical issues include fabrication uncertainty and noise disturbance, causing major difficulties for MEMS to achieve high-precision actuation and detection functions. For nano-precision actuators, we solve the fabrication instability and electrical noise problems using digital actuators coupled with nonlinear mechanical modulators. For the high-precision capacitive sensors, we present a branched finger electrodes using high-amplitude anti-phase sensing signals. We also demonstrate the potential applications of the nanoactuators and nanodetectors to high-precision positioning MEMS.
Publisher
IEEK
Issue Date
2002-12
Language
ENG
Citation

JOURNAL OD SEMICONDUCTOR TECHNOLOGY AND SCIENCE, v.2, no.4, pp.280 - 287

ISSN
1598-1657
URI
http://hdl.handle.net/10203/81806
Appears in Collection
BiS-Journal Papers(저널논문)
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