The thermo-optic coefficient (dn/dT) of inorganic-organic hybrid material films prepared by the sol-gel process of organoalkylsilanes is measured using a prism coupler equipped with a hot stage. The effect of the organic modifier on the variation of dn/T in inorganic-organic hybrid material films has been investigated. The value of dn/dt becomes more negative with increasing molecular weight of the organic modifier or with an increase in the proportion of modifier in the sample. On the other hand, dn/dT increases with an increase in the degree of organic photopolymerization. From these results, it can be seen that the value of dn/dT in these films can be varied between -0.83 x 10(-4)/degreesC to -2.43 x 10(-4)/degreesC by changing the organic modifier concentration and type.