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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Journal Papers(저널논문)

Paramagnetic structural defects and conductivity in hydrogenated nanocrystalline carbon-doped silicon films

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dc.contributor.authorShevaleevskii, OIko
dc.contributor.authorTsvetkov, AAko
dc.contributor.authorLarina, LLko
dc.contributor.authorMyong, SYko
dc.contributor.authorLim, Koeng Suko
dc.date.accessioned2013-03-03T16:33:41Z-
dc.date.available2013-03-03T16:33:41Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2004-
dc.identifier.citationSEMICONDUCTORS, v.38, no.5, pp.528 - 530-
dc.identifier.issn1063-7826-
dc.identifier.urihttp://hdl.handle.net/10203/79491-
dc.description.abstractThe behavior of paramagnetic defects and dark conductivity in heterogeneous samples of hydrogenated nanocrystalline carbon-containing silicon (nc-SiC:H) prepared by the photo-CVD method is studied. It is shown that, with increasing carbon content in nc-SiC:H, a phase transition from a nanocrystalline to an amorphous structure occurs, producing a reduction in paramagnetic defect density and a significant decrease in the dark conductivity. (C) 2004 MAIK "Nauka/Interperiodica".-
dc.languageEnglish-
dc.publisherAMER INST PHYSICS-
dc.subjectCHEMICAL-VAPOR-DEPOSITION-
dc.subjectMICROCRYSTALLINE-
dc.subjectDILUTION-
dc.subjectETHYLENE-
dc.titleParamagnetic structural defects and conductivity in hydrogenated nanocrystalline carbon-doped silicon films-
dc.typeArticle-
dc.identifier.wosid000221270200009-
dc.identifier.scopusid2-s2.0-2642541121-
dc.type.rimsART-
dc.citation.volume38-
dc.citation.issue5-
dc.citation.beginningpage528-
dc.citation.endingpage530-
dc.citation.publicationnameSEMICONDUCTORS-
dc.identifier.doi10.1134/1.1755884-
dc.contributor.localauthorLim, Koeng Su-
dc.contributor.nonIdAuthorShevaleevskii, OI-
dc.contributor.nonIdAuthorTsvetkov, AA-
dc.contributor.nonIdAuthorLarina, LL-
dc.contributor.nonIdAuthorMyong, SY-
dc.type.journalArticleArticle-
dc.subject.keywordPlusCHEMICAL-VAPOR-DEPOSITION-
dc.subject.keywordPlusMICROCRYSTALLINE-
dc.subject.keywordPlusDILUTION-
dc.subject.keywordPlusETHYLENE-
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EE-Journal Papers(저널논문)
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