Paramagnetic structural defects and conductivity in hydrogenated nanocrystalline carbon-doped silicon films

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The behavior of paramagnetic defects and dark conductivity in heterogeneous samples of hydrogenated nanocrystalline carbon-containing silicon (nc-SiC:H) prepared by the photo-CVD method is studied. It is shown that, with increasing carbon content in nc-SiC:H, a phase transition from a nanocrystalline to an amorphous structure occurs, producing a reduction in paramagnetic defect density and a significant decrease in the dark conductivity. (C) 2004 MAIK "Nauka/Interperiodica".
Publisher
AMER INST PHYSICS
Issue Date
2004
Language
English
Article Type
Article
Keywords

CHEMICAL-VAPOR-DEPOSITION; MICROCRYSTALLINE; DILUTION; ETHYLENE

Citation

SEMICONDUCTORS, v.38, no.5, pp.528 - 530

ISSN
1063-7826
DOI
10.1134/1.1755884
URI
http://hdl.handle.net/10203/79491
Appears in Collection
EE-Journal Papers(저널논문)
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