The perovskite phase formation of 0.4Pb(Yb1/2Nb1/2)O-3-0.6PbTiO(3) thin films prepared on Pt/Ti electrode by reactive magnetron sputtering

Cited 2 time in webofscience Cited 0 time in scopus
  • Hit : 129
  • Download : 0
Ferroelectric 0.4Pb(Yb1/2Nb1/2)O-3-0.6PbTiO(3) (PYNT) thin film was prepared on Pt/Ti/SiO2/Si(100) substrates by multi-target rf magnetron sputtering deposition at substrate temperature of 550 degreesC. The YbNbO4 oxide target was used as Yb and Nb sources. The effect of composition and substrate was investigated by X-ray diffraction analysis. Although the formation of perovskite phase mainly depends on the Pb sputtering power, the processing window is very narrow on Pt/Ti/SiO2/Si substrate. The substrates with the thick Pt electrodes tend to reduce the perovskite phase. Meanwhile, the TiO2 buffer layer deposited on the Pt surface is observed to enhance the formation of the perovskite phase. (C) 2001 Published by Elsevier Science Ltd.
Publisher
ELSEVIER SCI LTD
Issue Date
2001
Language
English
Article Type
Article; Proceedings Paper
Keywords

PB(YB1/2NB1/2)O-3-PBTIO3

Citation

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, v.21, no.10-11, pp.1553 - 1556

ISSN
0955-2219
DOI
10.1016/S0955-2219(01)00062-0
URI
http://hdl.handle.net/10203/78799
Appears in Collection
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 2 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0