A high-density MIM capacitor (13 fF/mu m(2)) using ALD HfO2 dielectrics

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dc.contributor.authorYu, XFko
dc.contributor.authorZhu, CXko
dc.contributor.authorHu, Hko
dc.contributor.authorChin, Ako
dc.contributor.authorLi, MFko
dc.contributor.authorCho, Byung Jinko
dc.contributor.authorKwong, DLko
dc.contributor.authorFoo, PDko
dc.contributor.authorYu, MBko
dc.date.accessioned2013-03-03T12:46:03Z-
dc.date.available2013-03-03T12:46:03Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2003-02-
dc.identifier.citationIEEE ELECTRON DEVICE LETTERS, v.24, no.2, pp.63 - 65-
dc.identifier.issn0741-3106-
dc.identifier.urihttp://hdl.handle.net/10203/78728-
dc.description.abstractMetal-insulator-metal (MIM) capacitors with a different thickness of HfO2 have been investigated. The results show that both the capacitance density and voltage coefficients of capacitance (VCCs) increase with decreasing the HfO2 thickness. In addition, it is also found that the VCCs decrease logarithmically with increasing the thickness Of HfO2. Furthermore, the MIM capacitor with 10-nm HfO2 shows a record high capacitance density of 13 fF/mum(2) and a VCC of 607 ppm/V, which can meet the requirement of the International Technology Roadmap for Semiconductors. It can also provide a low leakage current of 5.95 x 10-(8)A/cm(2) at room temperature at I V, low tangent values below 0.05, and a small frequency dependence as well. All these indicate that it is very suitable for use in silicon integrated circuit applications.-
dc.languageEnglish-
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC-
dc.titleA high-density MIM capacitor (13 fF/mu m(2)) using ALD HfO2 dielectrics-
dc.typeArticle-
dc.identifier.wosid000182516600004-
dc.identifier.scopusid2-s2.0-0037718406-
dc.type.rimsART-
dc.citation.volume24-
dc.citation.issue2-
dc.citation.beginningpage63-
dc.citation.endingpage65-
dc.citation.publicationnameIEEE ELECTRON DEVICE LETTERS-
dc.identifier.doi10.1109/LED.2002.808159-
dc.contributor.localauthorCho, Byung Jin-
dc.contributor.nonIdAuthorYu, XF-
dc.contributor.nonIdAuthorZhu, CX-
dc.contributor.nonIdAuthorHu, H-
dc.contributor.nonIdAuthorChin, A-
dc.contributor.nonIdAuthorLi, MF-
dc.contributor.nonIdAuthorKwong, DL-
dc.contributor.nonIdAuthorFoo, PD-
dc.contributor.nonIdAuthorYu, MB-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorfrequency dependency-
dc.subject.keywordAuthorhigh capacitance density-
dc.subject.keywordAuthormetal-insulator-metal (MIM) capacitor-
dc.subject.keywordAuthorthin-film devices-
dc.subject.keywordAuthorvoltage coefficient of capacitance (VCC)-
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