Orientation and fatigue improvement of PZT thin films on cubic textured CaRuO3 electrode

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In this study, we report on the (100) cube-textured Pb(Zr 0.4 ,Ti 0.6 )O 3 (PZT) thin films using a conducting perovskite CaRuO 3 (CRO) bottom electrode, and which was compared to the (111) textured PZT on Pt electrode. X-ray diffraction (XRD) reveals that the CRO bottom electrode has a pseudo-cubic nature on Si, and the PZT thin films prepared on CRO/Si shows a (100) textured growth. PZT films on CRO electrode have a well-saturated ferroelectricity with a remanent polarization (P r ) and coercive field (E c ) of 25 mu C/cm 2 and 75 kV/cm, respectively. These PZT films are more fatigue resistive character than that on Pt bottom electrode.
Publisher
TAYLOR FRANCIS LTD
Issue Date
2005
Language
English
Article Type
Article
Keywords

CHEMICAL-VAPOR-DEPOSITION; SILICON

Citation

INTEGRATED FERROELECTRICS, v.75, pp.115 - 121

ISSN
1058-4587
DOI
10.1080/10584580500413442
URI
http://hdl.handle.net/10203/7866
Appears in Collection
MS-Journal Papers(저널논문)
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