Ti thickness effects in Pt/Ti bottom electrode on properties of (Ba,Sr)TiO3 thin film

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Pt/Ti bilayers with various thicknesses of Ti adhesive layer were deposited in-situ by electron-beam evaporation on SiO2/Si substrates to investigate crystallinity, interdiffusion and surface morphology of Pt and overgrown BST films. It was found that the properties of Pt and BST films are strongly dependent on the thickness of a Ti layer, and the problems in Pt/Ti bilayer structure can be solved by using the Ti adhesive layer with the thickness range from 30 Angstrom to 50 Angstrom. Moreover, we could confirm the usefulness of Pt/Ti structure with suggested Ti thickness from the measurements of electrical properties such as dielectric constant and leakage current density.
Publisher
GORDON BREACH SCI PUBL LTD
Issue Date
1997
Language
English
Article Type
Article; Proceedings Paper
Keywords

INTEGRATION

Citation

INTEGRATED FERROELECTRICS, v.16, no.1-4, pp.183 - 190

ISSN
1058-4587
URI
http://hdl.handle.net/10203/77408
Appears in Collection
EE-Journal Papers(저널논문)
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