DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, SS | ko |
dc.contributor.author | Cho, WJ | ko |
dc.contributor.author | Ahn, CG | ko |
dc.contributor.author | Im, K | ko |
dc.contributor.author | Yang, JH | ko |
dc.contributor.author | Baek, IB | ko |
dc.contributor.author | Lee, S | ko |
dc.contributor.author | Lim, Koeng Su | ko |
dc.date.accessioned | 2007-07-02T06:53:30Z | - |
dc.date.available | 2007-07-02T06:53:30Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2006-05 | - |
dc.identifier.citation | APPLIED PHYSICS LETTERS, v.88, no.22, pp.223502 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | http://hdl.handle.net/10203/760 | - |
dc.description.abstract | The fin field-effect transistor (FET) silicon nanocrystal floating gate memory using the photochemical vapor deposition and the plasma doping processes was proposed. The silicon nanocrystals with a uniform size were formed on a vertical sidewall surface of the fin channel by the photochemical vapor deposition. The plasma doping was applied to form the junctions at the sidewall of the fin source-drain extension regions with a high aspect ratio. The FinFET silicon nanocrystal floating gate memory with a gate length of 100 nm was successfully fabricated and it revealed a memory effect as well as a suppressed short-channel effect. | - |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | AMER INST PHYSICS | - |
dc.subject | DEVICES | - |
dc.title | Fabrication of fin field-effect transistor silicon nanocrystal floating gate memory using photochemical vapor deposition | - |
dc.type | Article | - |
dc.identifier.wosid | 000238001900082 | - |
dc.identifier.scopusid | 2-s2.0-33744810856 | - |
dc.type.rims | ART | - |
dc.citation.volume | 88 | - |
dc.citation.issue | 22 | - |
dc.citation.beginningpage | 223502 | - |
dc.citation.publicationname | APPLIED PHYSICS LETTERS | - |
dc.identifier.doi | 10.1063/1.2208268 | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Lim, Koeng Su | - |
dc.contributor.nonIdAuthor | Kim, SS | - |
dc.contributor.nonIdAuthor | Cho, WJ | - |
dc.contributor.nonIdAuthor | Ahn, CG | - |
dc.contributor.nonIdAuthor | Im, K | - |
dc.contributor.nonIdAuthor | Yang, JH | - |
dc.contributor.nonIdAuthor | Baek, IB | - |
dc.contributor.nonIdAuthor | Lee, S | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | DEVICES | - |
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